| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reflected light measuring instrument capable of suppressing a measuring error to the utmost even if a measuring sample is a curved sample, and a reflected light measuring method. <P>SOLUTION: In the reflected light measuring apparatus, an illumination means is composed of a light source part 1a, a condensing lens 12 and a lens 7 for constructing a terecentric optical system, the measuring sample 2 is irradiated with measuring light at an angle inclined by a predetermined angle with respect to the normal line of the measuring sample 2. A light receiving means is an optical system composed of a lens 7, a light receiving lens 3 and a light receiving sensor 4 to detect the reflected light in the angle direction of 0°with respect to the normal line of a measuring surface 2S in the reflected light due to the irradiation with the measuring light. The illumination means and the light receiving means are set to an terecentric optical system by arranging the lens 7 in the light path thereof, and the irradiation angle of the measuring light to the curved surface sample and the receiving angle of the reflected light from the curved surface sample can be made same in the plane of the curved surface sample. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
