发明名称 |
Anodically bonded cell, method for making same and systems incorporating same |
摘要 |
A cell suitable for use with an atomic clock and a method for making the same, the cell including: a silicon wafer having a recess formed therein; at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon sealing the recess; and, an alkali metal containing component and buffer gas contained in the recess. The method includes: providing a silicon wafer; forming a cavity through the silicon wafer; introducing an alkali metal containing component and buffer gas into the cavity; and, anodically bonding at least one amorphous silicate member having an ion mobility and temperature expansion coefficient approximately that of silicon to the wafer to close the cavity.
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申请公布号 |
US2005184815(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20050030009 |
申请日期 |
2005.01.05 |
申请人 |
LIPP STEVEN A.;ABELES JOSEPH H.;BRAUN ALAN M.;MCBRIDE STERLING E.;RIGANATI JOHN P.;WHALEY RALPH D.JR.;ZANZUCCHI PETER J. |
发明人 |
LIPP STEVEN A.;ABELES JOSEPH H.;BRAUN ALAN M.;MCBRIDE STERLING E.;RIGANATI JOHN P.;WHALEY RALPH D.JR.;ZANZUCCHI PETER J. |
分类号 |
H01J25/50;(IPC1-7):H01J25/50 |
主分类号 |
H01J25/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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