发明名称 |
Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus |
摘要 |
A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
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申请公布号 |
US2005185026(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20050043029 |
申请日期 |
2005.01.25 |
申请人 |
NOGUCHI MOTOHISA;HIRAI EIJU |
发明人 |
NOGUCHI MOTOHISA;HIRAI EIJU |
分类号 |
B41J2/045;B41J2/055;B41J2/16;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/24;H02N2/00;H03B5/30;H03H3/02;H03H3/08;H03H9/02;H03H9/05;H03H9/17;H03H9/25;H03H9/64;(IPC1-7):B41J29/38 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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