| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a variable molding charged beam adjusting method, with which a proper molding gain can be easily determined. <P>SOLUTION: A variable molding charged beam adjusting method includes: a step S1 for preparing a substrate with a resist provided on its surface; steps S2, S3 for plotting a plurality of patterns, having different sizes and the same area on the resist by beam radiation of a variable molding beam type, based on plotting data of the plurality of patterns; a step S4 for developing the resist and forming a plurality of resist patterns corresponding to the plurality of patterns on the substrate; a step S5 for measuring dimensions of the plurality of resist patterns; and a step for adjusting a molding gain so that each of the dimensions of the plurality of resist patterns becomes a predetermined dimension. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
