| 摘要 |
PROBLEM TO BE SOLVED: To perform the observation of bright field and that of dark field simultaneously with simple constitution and a sample can be irradiated with the quantity of light optimized in accordance with an objective to be used. SOLUTION: The illuminator for the microscope is equipped with an illuminating light source for dark field 30 having a plurality of semiconductor light emitting elements 31 arranged in a ring state with an optical axis B as center and a lens 32 arranged near each light emitting element 31 and changing the light with which the light emitting element 31 is irradiated to nearly parallel beams, and a control part 40 controlling the illuminating light source 30. The control part 40 controls the plurality of light emitting elements 31 divided beforehand for every block. COPYRIGHT: (C)2005,JPO&NCIPI
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