发明名称 |
SEMICONDUCTOR PROCESS AND YIELD ANALYSIS INTEGRATED REAL-TIME MANAGEMENT METHOD |
摘要 |
A semiconductor process and yield analysis integrated real-time management method comprises inspecting a plurality of semiconductor products with a plurality of items to generate and record a plurality of inspecting results during semiconductor process, classifying the semiconductor products as a plurality of groups with a default rule to generate and record an initial data in a database, indexing a plurality of semiconductor product groups and the corresponding initial data from the database by a default product rule and parameter to calculate a corresponding analysis result, and displaying the analysis result according to the indexed semiconductor product groups and the initial data.
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申请公布号 |
US2005187648(A1) |
申请公布日期 |
2005.08.25 |
申请号 |
US20040708277 |
申请日期 |
2004.02.20 |
申请人 |
TAI HUNG-EN;CHEN CHIEN-CHUNG;WANG SHENG-JEN |
发明人 |
TAI HUNG-EN;CHEN CHIEN-CHUNG;WANG SHENG-JEN |
分类号 |
G05B19/418;G05B23/02;H01L21/02;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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