| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a ceramics heater having high water resistance and chemical resistance, and superior adhesive strength with a metal heater provided on a surface thereof, by improving denseness of an oxide layer in nitride ceramics having an oxide layer on a surface thereof, and using this layer as a base. <P>SOLUTION: An oxide layer is formed at least on one surface of metal, or semi-metallic nitride ceramics compact is divided into crack units as cracks, having branches between branches that the cracks with branches are mutually adjacent and crack units, from the ends to the nearest branch. In this case, when the length and the maximum width of each crack unit are respectively set to l nm and w nm, cracks with branches having crack units with w of 20 nm or larger and l of 500 nm or larger and w/l of 0.02 or larger are substantially eliminated. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
