| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer method which can shorten the product turn around time (TAT) of a substrate, and to provide an apparatus for the same. SOLUTION: Respective processors A-E are arranged in the order of the steps of processing to the substrate W on the periphery of a circumference conveyor apparatus K, substrate delivery apparatuses Ga and Gb for performing the delivery of the substrate W among both are arranged between the circumference conveyor apparatus K and the respective processors A-E, the substrate W which is contained in a pallet P with the circulating conveyor apparatus K is delivered sheet by sheet to the respective processors A-E, and predetermined processings are performed. The substrate W, processed by the respective processors A-E are substrate delivery apparatuses Ga and Gb processed by the respective processors A-E, are delivered to the empty pallet P which is standing by to the circumference conveyor apparatus K, and conveyed to the processors A-E of the subsequent processes. COPYRIGHT: (C)2005,JPO&NCIPI
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