| 摘要 |
PROBLEM TO BE SOLVED: To enable to easily and correctly measure the length of a testpiece from its image on a transmission electron microscope. SOLUTION: A scintillator 107 receives an electron ray image by electrons which have transmitted through a testpiece 103, acquires an optical image on the scintillator as a digital image by an image pick-up means 109 and displays it on a display device 122. A central operating unit 123 calculates the length of the testpiece corresponding to the pixels of the digital image on the basis of magnification information from a control system 121 for controlling a lens system, a magnification change rate produced by the deviation from a magnification reference position of the scintillator position, a magnification of an optical system 108 for projecting the optical image on the scintillator to the image pick-up means and the size of one pixel on a image pick-up surface 110 of the image pick-up means. COPYRIGHT: (C)2005,JPO&NCIPI
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