| 发明名称 |
METHOD AND APPARATUS EMPLOYING TURBO PUMP-FORELINE PUMP CONFIGURATION, FOR EXAMPLE, IN MASS SPECTROMETER |
| 摘要 |
A vacuum system for an analytical instrument such as a mass spectrometer employs a turbo pump-foreline pump configurations, where a volume between the turbo-drag pump and the foreline pump is sufficiently large to maintain the operation of the turbo-drag pump during periods when the foreline pump in an OFF state or in a low speed operation, thereby conserving power. |
| 申请公布号 |
WO2005031287(A3) |
申请公布日期 |
2005.08.25 |
| 申请号 |
WO2004US31450 |
申请日期 |
2004.09.24 |
| 申请人 |
OI CORPORATION;SCHEIDEMANN, ADI, A. |
发明人 |
SCHEIDEMANN, ADI, A. |
| 分类号 |
F04B23/08;F04B49/00;G01J;(IPC1-7):F04B49/00 |
主分类号 |
F04B23/08 |
| 代理机构 |
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代理人 |
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