CAPACITANCE DETECTION TYPE SENSOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a capacitance detection type sensor element capable of assuring the mechanical strength of a back electrode. SOLUTION: The capacitance detection type sensor elements 10 including a rectangular diaphragm 11 and the planar back electrode 12 provided facing each other includes fixing parts 14 provided adjacently to each side of the diaphragm 11 and having sides with predetermined length on the sides adjacent to the diaphragm 11. The back electrode 12 is supported at a state that a space 13 is provided between it and the diaphragm 11 by the fixing parts 14. Between the adjacent fixing parts which are not supported by the fixing parts 14 of the back electrode 12 are straight lines and the back electrode 12 is in the octagonal shape as a whole. COPYRIGHT: (C)2005,JPO&NCIPI