| 摘要 |
PROBLEM TO BE SOLVED: To surely hold a wafer at carrying in and out of it, and to give no damage to a holder used for carrying in and out of the wafer, in a wafer cassette wherein the wafer is stored between a support plate and a bulkhead plate. SOLUTION: The wafer cassette 1 at least comprises a plurality of support plates 10, each being formed with a cutout 100 to make the holder 22 for holding the wafer W to enter the wafer cassette 1 at the carrying in and carrying out of the wafer W, and a plurality of partition plates 11, each being arranged between each two adjacent support plates 10. Each of the partition plates 11 is in a non-fixed state between the two adjacent support plates 10. Due to this structure, when the holder 22 pushes the wafer W against the partition plate 11, the holder 22 and the partition plate 11 become parallel to each other, becomes a state of surely holding the wafer W. COPYRIGHT: (C)2005,JPO&NCIPI |
