发明名称 CAPACITIVE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a capacitive sensor which can improve sensitivity and which can reduce an input conversion noise level. SOLUTION: A guard electrode 4 is disposed between a first electrode 1 and a second electrode 2; an AC electric potential difference between the first electrode 1 and the guard electrode 4 approximately approaches zero so as to be at the same electric potential; and the variation in impedance between the first electrode 1 and the second electrode 2 is detected, by a capacitive sensor detection circuit 64. Thus, by making the apparent electric potential difference between both ends of the parasitic capacitance generated between the first electrode 1 and the guard electrode 4 be small or be at approximately zero, the parasitic capacitance does not function as a capacitor, and the apparent effect on the detection capacitance can be eliminated. Accordingly, only the amount of the variation in the capacitance of the capacitive sensor 10 can be detected by the capacitive sensor detection circuit 64. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005227182(A) 申请公布日期 2005.08.25
申请号 JP20040037334 申请日期 2004.02.13
申请人 TOKYO ELECTRON LTD 发明人 HOSHINO TOMOHISA
分类号 G01L9/00;G01D5/24;G01F1/28;G01L9/12;G01N27/22;(IPC1-7):G01L9/00 主分类号 G01L9/00
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