| 摘要 |
PROBLEM TO BE SOLVED: To provide an improvement of micro-machining type device for detecting pressure values comprising two components 200, 201, where the 1st component 200 has a 1st diaphragm 210 composed of 1st material while the 2nd component 201 composed of 2nd material has a 1st volume 250 and a 2nd volume 240, the 1st volume is formed thinner than the 2nd volume, the 1st diaphragm and at least a part of the 1st volume are firmly combined each other, and the 1st material has a thermal expansion coefficient larger than the 2nd one. SOLUTION: In this sensor, the 1st diaphragm 210 composed of the 1st material transmits horizontal expansion in temperature to the 1st volume 250 of the 2nd component 201 to allow a transmission of the horizontal expansion through a 1st binding material 220 provided between the 1st diaphragm 210 and at least a part of the 1st volume 250. COPYRIGHT: (C)2005,JPO&NCIPI |
