| 摘要 |
PROBLEM TO BE SOLVED: To provide a probing apparatus for inspecting circuit board capable of moving a probe for inspection at high speed while reducing manufacturing costs. SOLUTION: A first moving mechanism for moving the probe 16 for inspection in planar directions over a circuit board is constituted of arms 13a and 13b having one end parts each rotably fixed to a base part 11; an arm 14a having one end part rotably fixed to the other end part of the arm 13a; an arm 14b having one end part rotably fixed to the other end part of the arm 13b and the other end part of the arm 14b rotably fixed to the other end part of the arm 14a; and a parallel link mechanism RM1 having motors 12a and 12b for rotating the arms 13a and 13b. A second moving mechanism (a direct-acting mechanism 15) is fixed to the other end part of the arm 14b and moves the probe 16 for inspection in directions coming close and apart from the circuit board under control of a controlling part 4. COPYRIGHT: (C)2005,JPO&NCIPI
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