| 摘要 |
A fluid actuating apparatus is proposed, which includes: a diaphragm for providing a pressure change in fluid; a diaphragm-side electrode, formed for the diaphragm, for actuating the diaphragm; a substrate-side electrode formed so that it faces the diaphragm-side electrode; a space formed between the diaphragm-side electrode and the substrate-side electrode; and a support post, formed on the substrate-side electrode, for supporting the diaphragm-side electrode through the space. where the diaphragm-side electrode is formed so that it passes through the support post and extends to and covers part of the bottom of the support post.
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