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发明名称
JIG OF SENSOR FOR COUNTING APPARATUS OF WAFER
摘要
申请公布号
KR100511491(B1)
申请公布日期
2005.08.24
申请号
KR20040102168
申请日期
2004.12.07
申请人
KIM, WON KI
发明人
KIM, WON KI
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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