| 摘要 |
Described is a fluidic microsystem ( 100 ) including at least one channel ( 10 ) through which a particle suspension can flow; and first and second electrode devices ( 40, 60 ) which are arranged on first and second channel walls ( 21, 31 ) for generating electrical alternating-voltage fields in the channel ( 10 ); wherein the first electrode device ( 40 ) for field shaping in the channel includes at least one first structure element ( 41, 51 ); and the second electrode device ( 60 ) includes an area-like electrode layer ( 61 ) with a closed second electrode surface which includes a second passivation layer ( 70 ); wherein the effective electrode surface of the first structure element ( 41, 51 ), of which element ( 41, 51 ) there is at least one, is smaller than the second electrode surface; and the second passivation layer ( 70 ) is a closed layer which completely covers the second electrode layer ( 61 ). |
