发明名称 |
Parallel fault detection |
摘要 |
A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool (105A), receiving data associated with processing of a workpiece by a second processing tool (105B) and comparing at least a portion of the received data to a common fault model (180) to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool (105A) and processing of the workpiece by the second processing tool (105B) occurred. |
申请公布号 |
GB2411291(A) |
申请公布日期 |
2005.08.24 |
申请号 |
GB20050010169 |
申请日期 |
2003.11.06 |
申请人 |
* ADVANCED MICRO DEVICES, INC |
发明人 |
ELFIDO * COSS JR;ERNEST D * ADAMS III;ROBERT J * CHONG;HOWARD E * CASTLE;THOMAS J * SONDERMAN;ALEXANDER J * PASADYN |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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