| 发明名称 |
Chamber having components with textured surfaces and method of manufacture |
| 摘要 |
A component for a substrate processing chamber has a structure composed of aluminum oxide. The structure has a roughened surface having a roughness average of from about 150 to about 450 microinches. A plasma sprayed ceramic coating of aluminum oxide is deposited on the roughened surface of the structure. The component may be a dome shaped ceiling of the chamber.
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| 申请公布号 |
US6933025(B2) |
申请公布日期 |
2005.08.23 |
| 申请号 |
US20040807750 |
申请日期 |
2004.03.24 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LIN SHYH-NUNG;MENZIE MARK D.;SOMMERS JOE F.;CLAWSON DANIEL OWEN;MORI GLEN T.;SHARP LOLITA L. |
| 分类号 |
H05H1/46;B01J19/08;C04B41/87;C23C16/44;C23F4/00;H01J37/32;H01L21/3065;H05H1/32;H05H1/42;(IPC1-7):B32B1/08;B32B17/06;H01L21/306;C23C16/00;C23C14/00 |
主分类号 |
H05H1/46 |
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