发明名称 |
Laser-driven cleaning using reactive gases |
摘要 |
A method and apparatus for removing contaminants from the surface of a substrate. An explosive medium is introduced into a vicinity of the substrate, and a beam of electromagnetic energy is directed toward the substrate. Absorption of the electromagnetic energy causes the explosive medium both to generate a blast wave and to form reactive species, the blast wave and the reactive species cooperating to remove the contaminants from the surface substantially without damage to the surface itself.
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申请公布号 |
US6933464(B2) |
申请公布日期 |
2005.08.23 |
申请号 |
US20030611161 |
申请日期 |
2003.11.10 |
申请人 |
ORAMIR SEMICONDUCTOR EQUIPMENT LTD. |
发明人 |
YOGEV DAVID;LIVSHITZ (BUYANER) BORIS |
分类号 |
B08B7/00;H01L21/00;H01L21/68;(IPC1-7):B23K26/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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