| 摘要 |
The present invention intends to provide a method with a relatively uncomplicated mechanism, for assessing irradiation intensity of a laser beam, whereby an operator can accurately assess irradiation intensity of the laser beam, and to provide an apparatus used through this method. The method for assessing irradiation intensity of a laser beam includes steps of irradiating the laser beam onto a reference object on which a change in its state is caused by irradiating the laser beam, and a light quantity of transmitted light of specified illumination light changes in accordance with an irradiation energy density of the laser beam when the illumination light is projected, obtaining an image formed by a change in the light quantity of the transmitted light, occurring when the illumination light is projected on the reference object having been irradiated by the laser beam, and analyzing a condition of the change in the reference object based on the obtained image, wherein an irradiation intensity distribution of the laser beam is assessed based on an analytical result.
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