发明名称 |
Method for fabricating piezoelectric/electrostrictive device |
摘要 |
A piezoelectric/electrostrictive device is provided including a functional element. The functional element includes a base portion, a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane, a piezoelectric/electrostrictive element formed on the deformable portion, and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.
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申请公布号 |
US6931698(B2) |
申请公布日期 |
2005.08.23 |
申请号 |
US20020096059 |
申请日期 |
2002.03.12 |
申请人 |
NGK INSULATOR, LTD. |
发明人 |
TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;KIMURA KOJI |
分类号 |
G02B26/08;H01L41/04;H01L41/08;H01L41/09;H01L41/24;H01L41/314;H01L41/338;H02N2/02;H04R17/00;(IPC1-7):H04R17/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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