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发明名称
Device for Polishing Plasma Chamber Cathode Holes
摘要
申请公布号
KR200393534(Y1)
申请公布日期
2005.08.22
申请号
KR20050016263U
申请日期
2005.06.08
申请人
发明人
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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