发明名称 IDENTIFYING METHOD AND SYSTEM FOR POSITION OF STAGE USING TARGET IMAGES
摘要 <P>PROBLEM TO BE SOLVED: To position correctly the stage for the use of indicating or preserving of products. <P>SOLUTION: The position of a stage is identified. Some target images deployed on the stage concerned are acquired. By comparing those acquired target images concerned with the preserved images, displacement coordinates of each target are determined. The displacement coordinates of target concerned is converted into the position coordinates of the stage. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005221495(A) 申请公布日期 2005.08.18
申请号 JP20050002317 申请日期 2005.01.07
申请人 AGILENT TECHNOL INC 发明人 MUELLER LOUIS F;CHU DAVID C;BROSNAN MICHAEL JOHN;SCHLUCHTER WILLIAM C;YOUNG JEFFREY A;RAY ALAN B;WOOLVERTON DOUGLAS P
分类号 G01B11/00;E04F21/26;G01C11/00;G06K9/00;G06T7/00 主分类号 G01B11/00
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