发明名称 MANUFACTURING METHOD OF ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, AND PICTURE DISPLAY DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent a forming failure caused by existence of foreign matters on an element membrane during the conduction treatment of electron emitting part formation process. <P>SOLUTION: In an electron emitting element of surface conduction type, it is so composed that after forming electrodes 2, 3, and a conductive membrane 4, as well as an antistatic membrane 5 around the conductive membrane 4 on an insulating substrate 1, and by spraying de-ionized water at a hydraulic pressure of 5 MPa or more to wash the surface of the conductive membrane 4, the foreign matters are removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005222931(A) 申请公布日期 2005.08.18
申请号 JP20040368727 申请日期 2004.12.21
申请人 CANON INC 发明人 UDA YOSHIKI;YANAGISAWA YOSHIHIRO;ISHIWATARI KAZUYA
分类号 H01J9/02;(IPC1-7):H01J9/02 主分类号 H01J9/02
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