摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent a forming failure caused by existence of foreign matters on an element membrane during the conduction treatment of electron emitting part formation process. <P>SOLUTION: In an electron emitting element of surface conduction type, it is so composed that after forming electrodes 2, 3, and a conductive membrane 4, as well as an antistatic membrane 5 around the conductive membrane 4 on an insulating substrate 1, and by spraying de-ionized water at a hydraulic pressure of 5 MPa or more to wash the surface of the conductive membrane 4, the foreign matters are removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |