STAGE CONTROL DEVICE AND METHOD THEREFOR, AND MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a stage control device and a semiconductor manufacturing apparatus capable of realizing high precision stage control in drawing a circuit pattern on a sample. SOLUTION: The movement speed of the stage is estimated on the basis of position information of the stage from a laser interferometer serving to measure the position of the stage, and the movement speed of the stage is controlled on the basis of the movement speed. The movement speed of the stage is estimated on the basis of the rotary detector of a motor for moving the stage, and the movement speed of the stage is controlled on the basis of the movement speed. On the basis of the movement speeds of the stage estimated as above, a ratio of the controls of the movement speeds is determined. COPYRIGHT: (C)2005,JPO&NCIPI