| 摘要 |
PROBLEM TO BE SOLVED: To regulate flow speed and flow quantity of gas flowing along an end surface of a carrying head. SOLUTION: In the end surface of the carrying head 12, a gas supply surface 18 in which an opening part of a gas supply hole 19 is formed, a circular holding surface 21 protruded from it, and a gas guide surface 22 gently continuous from the gas supply surface 18 to the holding surface 21 are formed. A nozzle 24 installed on the carrying head 12 has a base part 24a installed on the carrying head 12, and a disc part 24b facing the gas supply surface 18, and having a circular slit 25 for discharging gas to it. The nozzle 24 is axially movable by a screw member 35 to the carrying head 12 to change the width of the slit 24. To the nozzle 24, elastic force in such a direction as to enlarge the width of the slit 25 is added by a rubber member 37. COPYRIGHT: (C)2005,JPO&NCIPI |
