| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact X-ray CT system capable of restraining cost-up to the utmost, while providing a carrying-in/-out function for various shapes of samples. SOLUTION: In this X-ray CT system, a rotary mechanism 6c for rotating a chucking device 6b is provided in a handling means 6 for chucking the sample W by the chucking device 6b to be carried in/out to a photographing space between an X-ray source 1 and an X-ray detector 2, and an X-ray transmission data is collected while the sample W is positioned to be rotated in the photographing space by the handling means. A sample stage including a rotary table and a mechanism for moving it three-dimensional-directionally are thereby not required substantially to allow compactification and cost reduction. COPYRIGHT: (C)2005,JPO&NCIPI
|
