发明名称 |
SYSTEM AND METHODS FOR CONVEYING AND TRANSPORTING LEVITATED ARTICLES |
摘要 |
A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substrate flattening functionality, and a scanning or imaging device, and scanning and imaging systems and methodologies employing such article conveying systems and methodologies. |
申请公布号 |
WO03061354(A3) |
申请公布日期 |
2005.08.18 |
申请号 |
WO2002IL01046 |
申请日期 |
2002.12.27 |
申请人 |
ORBOTECH LTD.;COREFLOW LTD.;ADIN, RAANAN;YASSOUR, YUVAL |
发明人 |
ADIN, RAANAN;YASSOUR, YUVAL |
分类号 |
G01N21/84;B65G49/06;B65G51/03;G03F7/20;H01L21/027;H01L21/677 |
主分类号 |
G01N21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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