发明名称 SYSTEM AND METHODS FOR CONVEYING AND TRANSPORTING LEVITATED ARTICLES
摘要 A system and methodology for conveying generally planar substrates such as printed circuit board, flat panel display and interconnect device substrates, in a levitated state, to and from a scanning or imaging location, including an air flow conveyor having a substrate flattening functionality, and a scanning or imaging device, and scanning and imaging systems and methodologies employing such article conveying systems and methodologies.
申请公布号 WO03061354(A3) 申请公布日期 2005.08.18
申请号 WO2002IL01046 申请日期 2002.12.27
申请人 ORBOTECH LTD.;COREFLOW LTD.;ADIN, RAANAN;YASSOUR, YUVAL 发明人 ADIN, RAANAN;YASSOUR, YUVAL
分类号 G01N21/84;B65G49/06;B65G51/03;G03F7/20;H01L21/027;H01L21/677 主分类号 G01N21/84
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