SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus which removes by-products attaching to the surface of a PG/PBN ceramic heater and thereby can make the ceramic heater reusable. SOLUTION: The substrate treatment apparatus wet-washes a heating means, and then heats it up at a first temperature. Thereafter, it heats up a substrate stored in a treatment chamber to a desired temperature using the heating means which has been heat-dried at a second temperature higher than the first one. Since the wet-washed heating means is not heated rapidly, the surface state of the heating means is not ruined. COPYRIGHT: (C)2005,JPO&NCIPI