发明名称 TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a testing device capable of supplying test signals to a plurality of tested devices formed on the same substrate to conduct tests, and capable of determining accurately the qualities of the plurality of tested devices. SOLUTION: This testing device for supplying the test signals to the plurality of tested devices formed on the same substrate to conduct the tests is provided with a pattern generating part for generating the test signal, a plurality of test signal delaying parts for delaying the test signal generated by the pattern generating part by respective different delay times, and a plurality of drivers for supplying the plurality of respective test signals different in timings delayed by the plurality of test signal delaying parts to the plurality of respective tested devices. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005221433(A) 申请公布日期 2005.08.18
申请号 JP20040031193 申请日期 2004.02.06
申请人 ADVANTEST CORP 发明人 HASHIMOTO JUN
分类号 G01R31/28;(IPC1-7):G01R31/28 主分类号 G01R31/28
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