发明名称 |
Field effect transistor device with channel fin structure and method of fabricating the same |
摘要 |
A finFET device includes a semiconductor substrate having specific regions surrounded with a trench. The trench is filled with an insulating layer, and recess holes are formed within the specific regions such that channel fins are formed by raised portions of the semiconductor substrate on both sides of the recess holes. Gate lines are formed to overlie and extend across the channel fins. Source/drain regions are formed at both ends of the channel fins and connected by the channel fins. Other embodiments are described and claimed.
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申请公布号 |
US2005179030(A1) |
申请公布日期 |
2005.08.18 |
申请号 |
US20040938436 |
申请日期 |
2004.09.09 |
申请人 |
SEO HYEOUNG-WON;YANG WOUN-SUCK;SONG DU-HEON;YOON JAE-MAN |
发明人 |
SEO HYEOUNG-WON;YANG WOUN-SUCK;SONG DU-HEON;YOON JAE-MAN |
分类号 |
H01L29/78;H01L21/336;H01L29/06;H01L29/786;(IPC1-7):H01L29/06 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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