| 摘要 |
An illumination system comprises a light source unit, a condenser lens, and a lens for constructing a telecentric optical system, and projects measuring light onto a specimen to be measured, from an angle tilted by a prescribed angle relative to the normal to the specimen. A light receiving system is an optical system comprising the lens, a light receiving lens, and a light receiving sensor and, of the reflected light produced by reflection of the measuring light, the light receiving system receives reflected light rays reflected in a direction whose angle to the normal to the measuring surface is 0°. In this way, the telecentric optical system is constructed by placing the lens in the light paths of the illumination system and the light receiving system; with this configuration, the projection angle of the measuring light to the curved specimen and the receiving angle of the reflected light from the curved specimen, respectively, can be made the same within the curved surface of the specimen.
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