发明名称 DRESSER AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a dresser which prevents diamond particles from slipping out of the same, grinds a grinding object in a manner reducing scratches on the grinding object, and has a long service life. <P>SOLUTION: According to the method, the diamond particles 3 each coated with a film formed of a conductive material are arranged in a plurality of through holes 20 formed in a holder 2 from above an upper surface 2a of the holder 2. Then a surface plate 1 having a recess 10a making contact with the tip of each diamond particle 3 protruding from the through hole 20 of the holder 2, is arranged on a lower surface 2b of the holder 2. Further a base member 5 is arranged on the upper surface 2a of the holder 2, and therefore the diamond particles 3 are firmly sandwiched by the holder 2 and the base member 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005219152(A) 申请公布日期 2005.08.18
申请号 JP20040028571 申请日期 2004.02.04
申请人 EBARA CORP;OKUTEKKU:KK 发明人 ISHII YU;OKUMURA KATSUYA
分类号 B24B53/12;B24B53/017;B24D3/00;H01L21/304 主分类号 B24B53/12
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