| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning liquid suitable for removing micro contamination containing an inorganic substance as a main ingredient. SOLUTION: The cleaning liquid is constituted and used by adding such surfactant as a nonionic surfactant to such fluoride system solvents as hydro fluorocarbon of carbon numbers 4-6 expressed with the formula (I), or as hydro fluoroether of carbon numbers 4-6 expressed with the formula (II). In the formula (I), each n is between four or more and six or less, and each m is one or more. In the formula (II), Rf1 and Rf2 are alkyl groups which have the alkyl groups or one or more fluorine atoms, independent and respectively. At least one of Rf1 or Rf2 is an alkyl group which has one or more fluorine atoms. COPYRIGHT: (C)2005,JPO&NCIPI
|
