| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus which can correctly protect a heater and a thermal insulator from overheating by means of a thermoswitch. SOLUTION: The substrate treatment apparatus comprises a treatment chamber for storing and treating a substrate, a gas supply pipe 5 for supplying a treatment gas to the treatment chamber, and a pipe heating system for heating the gas supply pipe. The pipe-heating system comprises a heating means 6 so installed as to cover the pipe, a temperature-sensitive breaker 8 which is installed in the heating means and cuts out the power supplied to the heating means, when the heating means reaches a prescribed temperature or higher, and the thermal insulator 7 so installed as to cover the heating means and the temperature sensitive breaker. Due to this structure, the temperature sensitive breaker can directly measure the temperature of the heating means, and thereby deviations in the operating temperature, caused by the difference in installation position of the temperature sensitive breaker, can be prevented. COPYRIGHT: (C)2005,JPO&NCIPI
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