RESIN VAPOR JETTING NOZZLE, DEVICE FOR DEPOSITING RESIN THIN FILM, AND METHOD FOR DEPOSITING RESIN THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a resin vapor jetting nozzle capable of depositing a resin thin film uniform to the pressure variation in resin vapor or uniform in the width direction of a substrate, and to provide a device for depositing a resin thin film and a method for depositing a resin thin film. SOLUTION: The resin vapor jet nozzle 201 has an opening part 103 to be fed with heated and vaporized resin and jetting the fed resin vapor. A plurality of partitions 202 are formed at the inside thereof or at the opening part 103. The length of each partition 202 is substantially the length of≥30% of the whole. COPYRIGHT: (C)2005,JPO&NCIPI