TECHNIQUE FOR PERFECTING THE ACTIVE REGIONS OF WIDE BANDGAP SEMICONDUCTOR NITRIDE DEVICES
摘要
This invention pertains to e lectronic/optoelectronic devices with reduced extended defects and to a method for making it. The method includes the steps of depositing a dielectric thin film mask material on a semiconductor substrate surface; patterning the mask material to form openings therein extending to the substrate surface; growing active material in the openings; removing the mask material to form the device with reduced extended defect density; and depositing electrical contacts on the device.
申请公布号
WO2005074451(A2)
申请公布日期
2005.08.18
申请号
WO2004US39792
申请日期
2004.11.22
申请人
THE GOVERNMENT OF THE UNITED STATES OF AMERICA, ASREPRESENTED BY THE SECRETARY OF THE NAVY
发明人
PECKERAR, MARTIN;HENRY, RICHARD;KOLESKE, DANIEL;WICKENDEN, ALMA;EDDY, CHARLES, R., JR.;HOLM, RONALD;TWIGG, MARK, E.