摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which is excellent in static pressure performance, economical and simple. SOLUTION: The pressure sensor is provided with a hole for impressing pressure, a pedestal for applying electrical and mechanical insulation, a diaphragm connected with the hole, and a strain gauge for converting a strain generated in the diaphragm into an electric signal, and a sensor connected with the pedestal. The pedestal is characteristically formed in a thickness without changing the strain at the time the static pressure is imparted. COPYRIGHT: (C)2005,JPO&NCIPI
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