发明名称 PRESSURE SENSOR AND METHOD OF MANUFACTURING PRESSURE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a pressure sensor which is excellent in static pressure performance, economical and simple. SOLUTION: The pressure sensor is provided with a hole for impressing pressure, a pedestal for applying electrical and mechanical insulation, a diaphragm connected with the hole, and a strain gauge for converting a strain generated in the diaphragm into an electric signal, and a sensor connected with the pedestal. The pedestal is characteristically formed in a thickness without changing the strain at the time the static pressure is imparted. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005221351(A) 申请公布日期 2005.08.18
申请号 JP20040028853 申请日期 2004.02.05
申请人 YOKOGAWA ELECTRIC CORP 发明人 KATOU AKIYUKI;SARUTANI TOSHIYUKI
分类号 G01L9/00;G01L9/06;G01L19/06;H01L29/84;(IPC1-7):G01L9/00 主分类号 G01L9/00
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