| 摘要 |
PROBLEM TO BE SOLVED: To reduce the pollution of the inside of chambers of an exposure apparatus. SOLUTION: The exposure apparatus comprises a plurality of chambers 67A, 67B, 67C, which have openings 26, 27, 28, 29, respectively, through which the chambers 67A, 67B, 67C are connected to be able to communicate with each other; and blocking parts 36, 37, 38, 39, which block the inflow of a gas into at least one of the chambers 67A, 67B, 67C through any of the openings 26, 27, 28, 29, when the chambers 67A, 67B, 67C are separated. COPYRIGHT: (C)2005,JPO&NCIPI
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