| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern detection method and a device in which a specific pattern portion of a part of repeating patterns can be moved in a short time and precisely into a visual field of an image observation device. SOLUTION: Line profiles of luminance are produced from image data obtained successively and concerning the line profiles of neighboring image data, the overlapping portions are judged and overlapped, thereby, a series of connected profiles are produced. The computer displays on a screen one connected profile by appropriately scaling it and the operator specifies a threshold of luminance. The computer 5 counts on the profiles a portion exceeding the threshold by judging it as a pattern, and displays the counting result on the screen. Based on the counting result displayed on the screen, it is judged whether or not the testpiece has reached a target position. COPYRIGHT: (C)2005,JPO&NCIPI
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