| 摘要 |
PROBLEM TO BE SOLVED: To allow patterns recorded on respective boards to appropriately face each other in predetermined positional relation even when the pattern on one board is distorted due to the expansion and contraction of the board or the like in the case of laminating a plurality of boards each on which a pattern is recorded. SOLUTION: After a plurality of marks is recorded on one board, the pattern is formed on the board. After the pattern is formed, the marks are read by a coordinate information acquiring device 27 to obtain region information representing the distortion degree in the region enclosed by the marks (region information acquiring unit 32). Image data representing a pattern to be recorded on the other board are created by CAD 25 and CAM 26. The image data are corrected in an image correcting unit 31 based on the region information, and the pattern represented by the corrected image data is recorded on the board by an exposing unit. COPYRIGHT: (C)2005,JPO&NCIPI
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