发明名称 Stamper original and its manufacturing method, stamper and its manufacturing method, and optical disk
摘要 An object of the present invention is to provide a stamper preform and others capable of obviating an Ni electroforming step taking a long time and readily producing a defective in production of a stamper and capable of forming an accurate and fine pattern of projections and indentations. A stamper preform 11 of the present invention has a base 1, a semi-crosslinked resist layer 2, and a prebaked resist layer 3 stacked in this order. The prebaked resist layer 3 contains a methoxymethyl melamine and bumps are readily formed therein by exposure and development (<FIGREF IDREF="DRAWINGS">FIG. 1C</FIGREF>).
申请公布号 US2005181089(A1) 申请公布日期 2005.08.18
申请号 US20050511491 申请日期 2005.04.12
申请人 NAGASE & CO. LTD 发明人 OGAWA SHU;YAMANAKA SHOJIRO;KOSHINO SADAFUMI;MIYAKE KOJI;SANO KAZUHIKO
分类号 G03F7/00;G11B7/26;(IPC1-7):A23G1/00 主分类号 G03F7/00
代理机构 代理人
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