发明名称 |
Stamper original and its manufacturing method, stamper and its manufacturing method, and optical disk |
摘要 |
An object of the present invention is to provide a stamper preform and others capable of obviating an Ni electroforming step taking a long time and readily producing a defective in production of a stamper and capable of forming an accurate and fine pattern of projections and indentations. A stamper preform 11 of the present invention has a base 1, a semi-crosslinked resist layer 2, and a prebaked resist layer 3 stacked in this order. The prebaked resist layer 3 contains a methoxymethyl melamine and bumps are readily formed therein by exposure and development (<FIGREF IDREF="DRAWINGS">FIG. 1C</FIGREF>).
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申请公布号 |
US2005181089(A1) |
申请公布日期 |
2005.08.18 |
申请号 |
US20050511491 |
申请日期 |
2005.04.12 |
申请人 |
NAGASE & CO. LTD |
发明人 |
OGAWA SHU;YAMANAKA SHOJIRO;KOSHINO SADAFUMI;MIYAKE KOJI;SANO KAZUHIKO |
分类号 |
G03F7/00;G11B7/26;(IPC1-7):A23G1/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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