| 摘要 |
Miniature accelerometer comprises a support, a seismic mass (1), flexible mechanical linkage (4) between mass (1) and support, means for acceleration determination (15,16) and spring device (2) for compensation of the effect of gravity on mass (1). The mass (1), mechanical linkage (4), support and spring device (2) are fabricated from the same silicon based substrate (10). The measurement of acceleration is achieved by measuring the change in capacitance between interlocking projecting teeth (15,16) of the mass (1) and its support. Fabrication of the accelerometer is by etching of a silicon block (11), which has been coated with silicon oxide. After fabrication of the weight, support and other parts, the compensating spring is tensioned and held by interlocking sprung projections so that gravity is compensated. |
