发明名称 SEMICONDUCTOR LAMINATING DEVICE AND ANALYZING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To make a system constructed in a small scale when one system is constituted of a plurality of semiconductor device. <P>SOLUTION: The device is highly integrated by laminating 3 units of semiconductor devices C, F and G on a substrate H. An adhesive b between the semiconductor device C of a first layer and the semiconductor F of a second layer is different in material from an adhesive c between the semiconductor device F of the second layer and the semiconductor device G of a third layer. When the semiconductor device F of the second layer is analyzed, only the adhesive c is removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005223248(A) 申请公布日期 2005.08.18
申请号 JP20040031907 申请日期 2004.02.09
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 TSUCHIDA MAYUMI
分类号 H01L25/18;H01L21/52;H01L25/065;H01L25/07;(IPC1-7):H01L25/065 主分类号 H01L25/18
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