| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method by which a core layer can be highly accurately formed and an optical waveguide having small optical loss can be manufactured. SOLUTION: A ultraviolet setting epoxy resin composition layer is formed on an underclad layer 2 formed on a substrate 1 and then, after the surface of the ultraviolet setting epoxy resin composition layer is exposed by irradiating it with a ultraviolet ray through a photomask of a prescribed pattern, the ultraviolet setting epoxy resin composition layer is heated. The unexposed part of the ultraviolet setting epoxy resin composition layer after the heating is dissolved and removed by using a developer to form a core layer 3, then an overclad layer 4 is formed on the core layer 3, and thus the optical waveguide is manufactured. In such a case, the ultraviolet setting epoxy resin composition layer is formed by using a layer forming material containing, as the main component, at least one epoxy resin as expressed in the specified formulas. COPYRIGHT: (C)2005,JPO&NCIPI |
