| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a film thickness distribution for inspecting film thickness unevenness of a thin film formed on a substrate surface generating color irregularity varied in a color by a view position and a view angle, in a manufacturing process for a display panel. SOLUTION: White light from a white light source 1 is converted into monochromatic light, the converted monochromatic light is brought into parallel light to irradiate the thin film 7 formed on the substrate 6 surface, the light transmitted through the thin film 7 or reflected light by the thin film 7 is imaged, the sum of absolute values of differences between brightness values in a plurality of positions and a brightness in the central position as to a picked-up image is calculated as a color unevenness value, the calculations of the color unevenness values are repeated a plurality of times while changing the imaging position, an integrated color unevenness is calculated based on the plurality of calculated color unevenness values, and the calculated integrated color unevenness is compared with a preset threshold value to inspect the film thickness unevenness. This method/device inspects the film thickness unevenness of the thin film 7 formed on the substrate 6 surface generating the color irregularity varied in the color by the view position and the view angle, by this manner. COPYRIGHT: (C)2005,JPO&NCIPI
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