发明名称 Integrated semiconductor circuit having a logic and power metallization without intermetal dielectric
摘要 An integrated semiconductor circuit having a first and a second portion of a substrate, in which a power semiconductor circuit structure and a logic circuit structure are respectively formed. The metallization having a power metal layer and an in relative terms thinner logic metal layer, the two metal layers being located directly above one another in this order, without an intermetal dielectric between them, only in the first portion above the power semiconductor circuit structure, and an uninterrupted conductive barrier layer being located at least between the power metal layer and the intermediate oxide layer and also between the power metal layer and the contact regions and electrode portions of the power semiconductor circuit structure which it contact-connects, and to a method for fabricating it.
申请公布号 US2005179068(A1) 申请公布日期 2005.08.18
申请号 US20050037273 申请日期 2005.01.18
申请人 RUEB MICHAEL;DETZEL THOMAS 发明人 RUEB MICHAEL;DETZEL THOMAS
分类号 H01L21/336;H01L21/768;H01L23/522;H01L23/528;H01L29/417;H01L29/45;H01L29/78;H01L31/113;(IPC1-7):H01L21/336 主分类号 H01L21/336
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