FILM FORMING METHOD, CARBON FILM, ELECTRONIC COMPONENT AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a film forming method for easily and inexpensively forming a carbon film with a prescribed pattern, the carbon film formed by the film forming method and an electronic component and electronic equipment provided with the carbon film. SOLUTION: The film forming method for forming the carbon film mainly constituted of a fibrous carbon material to have the prescribed pattern on a catalyst layer formed by supplying liquid containing a catalyst on a base material, has a 1st process for applying a prescribed treatment on a carbon film forming area of the base material having liquid repellency to the liquid on a surface of at least the side to form the carbon film to make the liquid repellency to the liquid on the film forming area lower than the liquid repellency on the non-film forming area, a 2nd process for supplying the liquid containing the catalyst to the base material to selectively form the catalyst layer on the film forming area by utilizing the difference of the liquid repellency between the film forming area and the non-film forming area and a 3rd process for forming the carbon film on the catalyst layer by utilizing the catalytic function. COPYRIGHT: (C)2005,JPO&NCIPI